Sophie Billat
Sophie Billat
Verified email at
Cited by
Cited by
Dielectric filters made of PS: advanced performance by oxidation and new layer structures
MG Berger, R Arens-Fischer, M Thönissen, M Krüger, S Billat, H Lüth, ...
Thin Solid Films 297 (1-2), 237-240, 1997
Influence of etch stops on the microstructure of porous silicon layers
S Billat, M Thönissen, R Arens-Fischer, MG Berger, M Krüger, H Lüth
Thin solid films 297 (1-2), 22-25, 1997
Micromachined inclinometer with high sensitivity and very good stability
S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, H Sandmaier, ...
Sensors and Actuators A: Physical 97, 125-130, 2002
Structuring of membrane sensors using sacrificial porous silicon
F Hedrich, S Billat, W Lang
Sensors and Actuators A: Physical 84 (3), 315-323, 2000
Analysis of the depth homogeneity of p-PS by reflectance measurements
M Thönissen, MG Berger, S Billat, R Arens-Fischer, M Krüger, H Lüth, ...
Thin Solid Films 297 (1-2), 92-96, 1997
Depth inhomogeneity of porous silicon layers
M Thönissen, S Billat, M Krüger, H Lüth, MG Berger, U Frotscher, ...
Journal of applied physics 80 (5), 2990-2993, 1996
Thermal flow sensors for MEMS spirometric devices
F Hedrich, K Kliche, M Storz, S Billat, M Ashauer, R Zengerle
Sensors and Actuators A: Physical 162 (2), 373-378, 2010
Bright visible light emission from electro-oxidized porous silicon: a quantum confinement effect
JC Vial, S Billat, A Bsiesy, G Fishman, F Gaspard, R Herino, M Ligeon, ...
Physica B: Condensed Matter 185 (1-4), 593-602, 1993
Color-sensitive photodetector based on porous silicon superlattices
M Krüger, M Marso, MG Berger, M Thönissen, S Billat, R Loo, W Reetz, ...
Thin Solid Films 297 (1-2), 241-244, 1997
Convection-based micromachined inclinometer using SOI technology
S Billat, H Glosch, M Kunze, F Hedrich, J Frech, J Auber, W Lang, ...
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001
Analysis of the electroluminescence observed during the anodic oxidation of porous layers formed on lightly p‐doped silicon
M Ligeon, F Muller, R Herino, F Gaspard, JC Vial, R Romestain, S Billat, ...
Journal of applied physics 74 (2), 1265-1271, 1993
Electroluminescence of Heavily Doped p‐Type Porous Silicon under Electrochemical Oxidation in Galvanostatic Regime
S Billat
Journal of the Electrochemical Society 143 (3), 1055, 1996
Monolithic integration of micro-channel on disposable flow sensors for medical applications
S Billat, K Kliche, R Gronmaier, P Nommensen, J Auber, F Hedrich, ...
Sensors and Actuators A: Physical 145, 66-74, 2008
X-ray study of the anodic oxidation of p+ porous silicon
D Bellet, S Billat, G Dolino, M Ligeon, C Meyer, F Muller
Solid state communications 86 (1), 51-54, 1993
Sensor for gas analysis based on thermal conductivity, specific heat capacity and thermal diffusivity
K Kliche, S Billat, F Hedrich, C Ziegler, R Zengerle
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
Visible light emission from silicon: a quantum effect in highly porous materials
JC Vial, R Herino, S Billat, A Bsiesy, F Gaspard, M Ligeon, I Mihalcescu, ...
IEEE transactions on nuclear science 39 (4), 563-569, 1992
Sensor for thermal gas analysis based on micromachined silicon-microwires
K Kliche, G Kattinger, S Billat, L Shen, S Messner, R Zengerle
IEEE Sensors Journal 13 (7), 2626-2635, 2013
Electroluminescent Properties of Porous Silicon Films under Electrochemical Oxidation
S Billat, A Bsiesy, F Gaspard, R Herino, M Ligeon, F Muller, R Romestain, ...
MRS Online Proceedings Library (OPL) 256, 215, 1991
Electroluminescence of heavily doped p-type porous silicon under electrochemical oxidation in the potentiostatic regime
S Billat, F Gaspard, R Herino, M Ligeon, F Muller, F Romestain, JC Vial
Thin solid films 263 (2), 238-242, 1995
A planar thin-film peltier cooler for the thermal management of a dew-point sensor system
A Ihring, E Kessler, U Dillner, U Schinkel, M Kunze, S Billat
Journal of Microelectromechanical Systems 24 (4), 990-996, 2014
The system can't perform the operation now. Try again later.
Articles 1–20