| Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever HS Wasisto, S Merzsch, A Waag, E Uhde, T Salthammer, E Peiner Sensors and Actuators B: Chemical 180, 77-89, 2013 | 180 | 2013 |
| Doping profile analysis in Si by electrochemical capacitance‐voltage measurements E Peiner, A Schlachetzki, D Krüger Journal of the Electrochemical Society 142 (2), 576, 1995 | 174 | 1995 |
| Piezoresistive cantilever as portable micro force calibration standard I Behrens, L Doering, E Peiner Journal of micromechanics and microengineering 13 (4), S171, 2003 | 116 | 2003 |
| Thermoelectric properties of high-doped silicon from room temperature to 900 K A Stranz, J Kähler, A Waag, E Peiner Journal of electronic materials 42, 2381-2387, 2013 | 105 | 2013 |
| Sintering of copper particles for die attach J Kahler, N Heuck, A Wagner, A Stranz, E Peiner, A Waag IEEE Transactions on Components, Packaging and Manufacturing Technology 2 …, 2012 | 102 | 2012 |
| Micro force sensor with piezoresistive amorphous carbon strain gauge E Peiner, A Tibrewala, R Bandorf, S Biehl, H Lüthje, L Doering Sensors and actuators A: Physical 130, 75-82, 2006 | 91 | 2006 |
| GaN nanowire arrays with nonpolar sidewalls for vertically integrated field-effect transistors F Yu, S Yao, F Römer, B Witzigmann, T Schimpke, M Strassburg, A Bakin, ... Nanotechnology 28 (9), 095206, 2017 | 86 | 2017 |
| Piezoresistive microcantilevers for humidity sensing J Xu, M Bertke, HS Wasisto, E Peiner Journal of Micromechanics and Microengineering 29 (5), 053003, 2019 | 84 | 2019 |
| Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection HS Wasisto, S Merzsch, A Stranz, A Waag, E Uhde, T Salthammer, ... Sensors and Actuators B: Chemical 189, 146-156, 2013 | 81 | 2013 |
| Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films A Tibrewala, E Peiner, R Bandorf, S Biehl, H Lüthje Applied surface science 252 (15), 5387-5390, 2006 | 81 | 2006 |
| Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever HS Wasisto, S Merzsch, E Uhde, A Waag, E Peiner Microelectronic Engineering 145, 96-103, 2015 | 75 | 2015 |
| Form measurement inside fuel injector nozzle spray holes E Peiner, M Balke, L Doering Microelectronic Engineering 86 (4-6), 984-986, 2009 | 74 | 2009 |
| Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing J Xu, M Bertke, X Li, H Mu, H Zhou, F Yu, G Hamdana, A Schmidt, ... Sensors and Actuators B: Chemical 273, 276-287, 2018 | 73 | 2018 |
| Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures Ü Sökmen, A Stranz, S Fündling, HH Wehmann, V Bandalo, A Bora, ... Journal of Micromechanics and Microengineering 19 (10), 105005, 2009 | 73 | 2009 |
| A micromachined vibration sensor based on the control of power transmitted between optical fibres E Peiner, D Scholz, A Schlachetzki, P Hauptmann Sensors and Actuators A: Physical 65 (1), 23-29, 1998 | 68 | 1998 |
| Pick-and-place silver sintering die attach of small-area chips J Kahler, N Heuck, A Stranz, A Waag, E Peiner IEEE Transactions on Components, Packaging and Manufacturing Technology 2 (2 …, 2011 | 67 | 2011 |
| Diamond-like carbon for MEMS E Peiner, A Tibrewala, R Bandorf, H Lüthje, L Doering, W Limmer Journal of micromechanics and microengineering 17 (7), S83, 2007 | 63 | 2007 |
| Portable cantilever-based airborne nanoparticle detector HS Wasisto, S Merzsch, A Waag, E Uhde, T Salthammer, E Peiner Sensors and Actuators B: Chemical 187, 118-127, 2013 | 62 | 2013 |
| A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors HS Wasisto, Q Zhang, S Merzsch, A Waag, E Peiner Microsystem technologies 20, 559-569, 2014 | 60 | 2014 |
| Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode AD Refino, N Yulianto, I Syamsu, AP Nugroho, NH Hawari, A Syring, ... Scientific reports 11 (1), 19779, 2021 | 57 | 2021 |
Hutomo Suryo WasistoInfineon Technologies AGVerified email at infineon.com
