Paul Muralt

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Andrei KholkinUniversity of AveiroVerified email at ua.pt
Dimos PoulikakosETH ZurichVerified email at ethz.ch
Nachi ChidambaramApple Inc.Verified email at apple.com
Ludwig J. GaucklerETH ZürichVerified email at mat.ethz.ch
Enrico CollaInstitute of Materials, EPFL, LausanneVerified email at infoprint.ch
Dong Su（苏东）Institute of Physics, CAS; Past: Brookhaven National Laboratory；Stony Brook Univ.; ASU; EPFLVerified email at iphy.ac.cn
Guochu DengAustralian Centre for Neutron Scattering, Australian Nuclear Science and Technology OrganizationVerified email at ansto.gov.au
Susan Trolier-McKinstrySteward S. Flaschen Professor of Ceramic Science and Engineering and Electrical Eng., Penn StateVerified email at psu.edu
Dragan DamjanovicEcole polytechnique fédérale de Lausanne / EPFL - Swiss Federal Institute of Technology in LausanneVerified email at epfl.ch
Jennifer RuppProfessor TU Munich & Visiting Professor MITVerified email at tum.de
giacomo benvenuti3D-oxides and ABCD TechnologyVerified email at abcd-technology.com
Seungbum HongKorea Advanced Institute of Science and Technology (KAIST)Verified email at kaist.ac.kr
Nico HotzVerified email at duke.edu
Alex DommannUniversität BernVerified email at unibe.ch
Simon RushworthEpiValence, Epichem, SAFC Hitech, Tyndall R&D projectsVerified email at tiscali.co.uk
Ali DabirianIPMVerified email at ipm.ir
Juergen BruggerProfessor of Microengineering (EPFL)Verified email at epfl.ch
Utku BaranCaltech, University of Washington, Koc UniversityVerified email at caltech.edu
HAKAN UREYProfessor at Koc University, Istanbul, TURKEYVerified email at ku.edu.tr
Sven HolmstromVSY BiotechnologyVerified email at vsybiotechnology.com

Paul Muralt

Professor in Materials Science, EPFL, Lausanne, Switzerland

Verified email at epfl.ch - Homepage

micro and nano systems piezoelectricity thin films


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Thin film piezoelectrics for MEMS S Trolier-McKinstry, P Muralt Journal of Electroceramics 12, 7-17, 2004	1263	2004
Ferroelectric thin films for micro-sensors and actuators: a review P Muralt Journal of micromechanics and microengineering 10 (2), 136, 2000	1133	2000
Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications MA Dubois, P Muralt Applied Physics Letters 74 (20), 3032-3034, 1999	585	1999
PZT thin films for microsensors and actuators: Where do we stand? P Muralt IEEE transactions on ultrasonics, ferroelectrics, and frequency control 47 …, 2000	462	2000
{1 0 0}-Textured, piezoelectric Pb (Zrx, Ti1− x) O3 thin films for MEMS: integration, deposition and properties N Ledermann, P Muralt, J Baborowski, S Gentil, K Mukati, M Cantoni, ... Sensors and Actuators A: Physical 105 (2), 162-170, 2003	438	2003
Recent progress in materials issues for piezoelectric MEMS P Muralt Journal of the American Ceramic Society 91 (5), 1385-1396, 2008	422	2008
Micromachined infrared detectors based on pyroelectric thin films P Muralt Reports on progress in physics 64 (10), 1339, 2001	405	2001
Piezoelectric thin films for sensors, actuators, and energy harvesting P Muralt, RG Polcawich, S Trolier-McKinstry MRS bulletin 34 (9), 658-664, 2009	393	2009
Piezoelectric micromachined ultrasonic transducers based on PZT thin films P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005	381	2005
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering MA Dubois, P Muralt Journal of Applied Physics 89 (11), 6389-6395, 2001	375	2001
Thickness dependence of the properties of highly c-axis textured AlN thin films F Martin, P Muralt, MA Dubois, A Pezous Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (2 …, 2004	370	2004
Measurement of the effective transverse piezoelectric coefficient e31, f of AlN and Pb (Zrx, Ti1− x) O3 thin films MA Dubois, P Muralt Sensors and Actuators A: Physical 77 (2), 106-112, 1999	339	1999
Texture control of and thin films with seeding P Muralt, T Maeder, L Sagalowicz, S Hiboux, S Scalese, D Naumovic, ... Journal of Applied Physics 83 (7), 3835-3841, 1998	330	1998
Scanning tunneling potentiometry P Muralt, DW Pohl Applied Physics Letters 48 (8), 514-516, 1986	304	1986
Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size S Bühlmann, B Dwir, J Baborowski, P Muralt Integrated Ferroelectrics 50 (1), 261-267, 2002	293	2002
A micro-solid oxide fuel cell system as battery replacement A Bieberle-Hütter, D Beckel, A Infortuna, UP Muecke, JLM Rupp, ... Journal of Power Sources 177 (1), 123-130, 2008	266	2008
Fabrication and characterization of PZT thin-film vibrators for micromotors P Muralt, M Kohli, T Maeder, A Kholkin, K Brooks, N Setter, R Luthier Sensors and Actuators A: Physical 48 (2), 157-165, 1995	254	1995
Piezoelectric aluminum nitride thin films for microelectromechanical systems G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby MRS bulletin 37 (11), 1051-1061, 2012	248	2012
Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions P Muralt, A Kholkin, M Kohli, T Maeder Sensors and Actuators A: Physical 53 (1-3), 398-404, 1996	247	1996
Piezoelectric thin films for MEMS P Muralt Integrated Ferroelectrics 17 (1-4), 297-307, 1997	237	1997

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