On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy films MI Alayo, I Pereyra, WL Scopel, MCA Fantini Thin Solid Films 402 (1-2), 154-161, 2002 | 211 | 2002 |
Thick SiOxNy and SiO2 films obtained by PECVD technique at low temperatures MI Alayo, I Pereyra, MNP Carreno Thin Solid Films 332 (1-2), 40-45, 1998 | 121 | 1998 |
High quality low temperature DPECVD silicon dioxide I Pereyra, MI Alayo Journal of Non-Crystalline Solids 212 (2-3), 225-231, 1997 | 98 | 1997 |
Study of nitrogen-rich silicon oxynitride films obtained by PECVD D Criado, I Pereyra, MI Alayo Materials Characterization 50 (2-3), 167-171, 2003 | 70 | 2003 |
Local structure and bonds of amorphous silicon oxynitride thin films WL Scopel, MCA Fantini, MI Alayo, I Pereyra Thin solid films 413 (1-2), 59-64, 2002 | 57 | 2002 |
Silicon rich silicon oxynitride films for photoluminescence applications M Ribeiro, I Pereyra, MI Alayo Thin Solid Films 426 (1-2), 200-204, 2003 | 44 | 2003 |
A review on pedestal waveguides for low loss optical guiding, optical amplifiers and nonlinear optics applications DO Carvalho, LRP Kassab, VD Del Cacho, DM da Silva, MI Alayo Journal of Luminescence 203, 135-144, 2018 | 43 | 2018 |
PECVD-SiOxNy films for large area self-sustained grids applications MNP Carreno, MI Alayo, I Pereyra, AT Lopes Sensors and Actuators A: Physical 100 (2-3), 295-300, 2002 | 43 | 2002 |
Structural analysis of silicon oxynitride films deposited by PECVD D Criado, MI Alayo, I Pereyra, MCA Fantini Materials Science and Engineering: B 112 (2-3), 123-127, 2004 | 42 | 2004 |
Study of the mechanical and structural properties of silicon oxynitride films for optical applications D Criado, MI Alayo, MCA Fantini, I Pereyra Journal of non-crystalline solids 352 (23-25), 2319-2323, 2006 | 33 | 2006 |
Fabrication of PECVD-silicon oxynitride-based optical waveguides MI Alayo, D Criado, MNP Carreño, I Pereyra Materials Science and Engineering: B 112 (2-3), 154-159, 2004 | 31 | 2004 |
Influence of gold nanoparticles on the 805 nm gain in Tm3+/Yb3+ codoped PbO-GeO2 pedestal waveguides TAA de Assumpção, ME Camilo, MI Alayo, DM da Silva, LRP Kassab Optical Materials 72, 518-523, 2017 | 29 | 2017 |
Advances on the fabrication process of Er3+/Yb3+: GeO2–PbO pedestal waveguides for integrated photonics FA Bomfim, DM Da Silva, LRP Kassab, TAA De Assumpção, ... Optical Materials 49, 196-200, 2015 | 28 | 2015 |
A new fabrication process of pedestal waveguides based on metal dielectric composites of Yb3+/Er3+ codoped PbO-GeO2 thin films with gold nanoparticles FA Bomfim, RC Rangel, DM da Silva, DO Carvalho, EG Melo, MI Alayo, ... Optical Materials 86, 433-440, 2018 | 25 | 2018 |
Deposition and characterization of silicon oxynitride for integrated optical applications MI Alayo, D Criado, LCD Gonçalves, I Pereyra Journal of non-crystalline solids 338, 76-80, 2004 | 24 | 2004 |
Directional random laser source consisting of a HC-ARROW reservoir connected to channels for spectroscopic analysis in microfluidic devices KC Jorge, MA Alvarado, EG Melo, MNP Carreño, MI Alayo, NU Wetter Applied Optics 55 (20), 5393-5398, 2016 | 23 | 2016 |
Chemical and morphological properties of amorphous silicon oxynitride films deposited by plasma enhanced chemical vapor deposition WL Scopel, RR Cuzinatto, MH Tabacniks, MCA Fantini, MI Alayo, ... Journal of non-crystalline solids 288 (1-3), 88-95, 2001 | 22 | 2001 |
Low-loss pedestal Ta2O5 nonlinear optical waveguides JH Sierra, RC Rangel, RE Samad, ND Vieira, MI Alayo, DO Carvalho Optics Express 27 (26), 37516-37521, 2019 | 20 | 2019 |
Structural investigation of Si-rich amorphous silicon oxynitride films WL Scopel, MCA Fantini, MI Alayo, I Pereyra Thin Solid Films 425 (1-2), 275-281, 2003 | 20 | 2003 |
Fabrication and characterization of pedestal optical waveguides using TeO2–WO3–Bi2O3 thin film as core layer ME Camilo, LRP Kassab, TAA Assumpção, VDD Cacho, MI Alayo Thin solid films 571, 225-229, 2014 | 19 | 2014 |