Ulrich Schmid
Ulrich Schmid
Professor Microsystems Technology, TU Wien
Verified email at - Homepage
Cited by
Cited by
The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
A Ababneh, U Schmid, J Hernando, JL Sánchez-Rojas, H Seidel
Materials Science and Engineering: B 172 (3), 253-258, 2010
SiC devices for advanced power and high-temperature applications
W Wondrak, R Held, E Niemann, U Schmid
IEEE Transactions on Industrial Electronics 48 (2), 307-308, 2001
High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
W Wang, PM Mayrhofer, X He, M Gillinger, Z Ye, X Wang, A Bittner, ...
Applied physics letters 105 (13), 2014
Wireless sensor node powered by aircraft specific thermoelectric energy harvesting
D Samson, M Kluge, T Becker, U Schmid
Sensors and Actuators A: Physical 172 (1), 240-244, 2011
Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing
T Manzaneque, V Ruiz-Díez, J Hernando-García, E Wistrela, M Kucera, ...
Sensors and Actuators A: Physical 220, 305-315, 2014
Modal optimization and filtering in piezoelectric microplate resonators
JL Sanchez-Rojas, J Hernando, A Donoso, JC Bellido, T Manzaneque, ...
Journal of micromechanics and microengineering 20 (5), 055027, 2010
Aircraft-specific thermoelectric generator module
D Samson, T Otterpohl, M Kluge, U Schmid, T Becker
Journal of Electronic Materials 39, 2092-2095, 2010
Microstructure and piezoelectric response of YxAl1− xN thin films
PM Mayrhofer, H Riedl, H Euchner, M Stöger-Pollach, PH Mayrhofer, ...
Acta Materialia 100, 81-89, 2015
The impact of thermal annealing and adhesion film thickness on the resistivity and the agglomeration behavior of titanium/platinum thin films
U Schmid
Journal of Applied Physics 103 (5), 2008
Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode
M Kucera, E Wistrela, G Pfusterschmied, V Ruiz-Díez, T Manzaneque, ...
Sensors and Actuators B: Chemical 200, 235-244, 2014
RF-MEMS switch and phase shifter optimized for W-band
A Stehle, G Georgiev, V Ziegler, B Schoenlinner, U Prechtel, H Seidel, ...
2008 38th European Microwave Conference, 104-107, 2008
Silicon microcavity arrays with open access and a finesse of half a million
G Wachter, S Kuhn, S Minniberger, C Salter, P Asenbaum, J Millen, ...
light: science & applications 8 (1), 37, 2019
c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes
A Ababneh, M Alsumady, H Seidel, T Manzaneque, J Hernando-García, ...
Applied Surface Science 259, 59-65, 2012
The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin films
M Grosser, U Schmid
Thin Solid Films 517 (16), 4493-4496, 2009
A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft
A Elefsiniotis, N Kokorakis, T Becker, U Schmid
Sensors and Actuators A: Physical 206, 159-164, 2014
Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions
A Ababneh, H Kreher, U Schmid
Microsystem Technologies 14, 567-573, 2008
ScAlN MEMS cantilevers for vibrational energy harvesting purposes
PM Mayrhofer, C Rehlendt, M Fischeneder, M Kucera, E Wistrela, ...
Journal of Microelectromechanical Systems 26 (1), 102-112, 2016
Effect of high temperature annealing on the electrical performance of titanium/platinum thin films
U Schmid, H Seidel
Thin Solid Films 516 (6), 898-906, 2008
A robust pressure sensor for harsh environmental applications
S Fricke, A Friedberger, H Seidel, U Schmid
Sensors and Actuators A: Physical 184, 16-21, 2012
The porosification of fired LTCC substrates by applying a wet chemical etching procedure
A Bittner, U Schmid
Journal of the European Ceramic Society 29 (1), 99-104, 2009
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