| The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films A Ababneh, U Schmid, J Hernando, JL Sánchez-Rojas, H Seidel Materials Science and Engineering: B 172 (3), 253-258, 2010 | 204 | 2010 |
| SiC devices for advanced power and high-temperature applications W Wondrak, R Held, E Niemann, U Schmid IEEE Transactions on Industrial Electronics 48 (2), 307-308, 2001 | 134 | 2001 |
| High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient W Wang, PM Mayrhofer, X He, M Gillinger, Z Ye, X Wang, A Bittner, ... Applied physics letters 105 (13), 2014 | 116 | 2014 |
| Wireless sensor node powered by aircraft specific thermoelectric energy harvesting D Samson, M Kluge, T Becker, U Schmid Sensors and Actuators A: Physical 172 (1), 240-244, 2011 | 114 | 2011 |
| Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing T Manzaneque, V Ruiz-Díez, J Hernando-García, E Wistrela, M Kucera, ... Sensors and Actuators A: Physical 220, 305-315, 2014 | 97 | 2014 |
| Modal optimization and filtering in piezoelectric microplate resonators JL Sanchez-Rojas, J Hernando, A Donoso, JC Bellido, T Manzaneque, ... Journal of micromechanics and microengineering 20 (5), 055027, 2010 | 81 | 2010 |
| Aircraft-specific thermoelectric generator module D Samson, T Otterpohl, M Kluge, U Schmid, T Becker Journal of Electronic Materials 39, 2092-2095, 2010 | 79 | 2010 |
| Microstructure and piezoelectric response of YxAl1− xN thin films PM Mayrhofer, H Riedl, H Euchner, M Stöger-Pollach, PH Mayrhofer, ... Acta Materialia 100, 81-89, 2015 | 78 | 2015 |
| The impact of thermal annealing and adhesion film thickness on the resistivity and the agglomeration behavior of titanium/platinum thin films U Schmid Journal of Applied Physics 103 (5), 2008 | 73 | 2008 |
| Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode M Kucera, E Wistrela, G Pfusterschmied, V Ruiz-Díez, T Manzaneque, ... Sensors and Actuators B: Chemical 200, 235-244, 2014 | 70 | 2014 |
| RF-MEMS switch and phase shifter optimized for W-band A Stehle, G Georgiev, V Ziegler, B Schoenlinner, U Prechtel, H Seidel, ... 2008 38th European Microwave Conference, 104-107, 2008 | 63 | 2008 |
| Silicon microcavity arrays with open access and a finesse of half a million G Wachter, S Kuhn, S Minniberger, C Salter, P Asenbaum, J Millen, ... light: science & applications 8 (1), 37, 2019 | 59 | 2019 |
| c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes A Ababneh, M Alsumady, H Seidel, T Manzaneque, J Hernando-García, ... Applied Surface Science 259, 59-65, 2012 | 58 | 2012 |
| The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin films M Grosser, U Schmid Thin Solid Films 517 (16), 4493-4496, 2009 | 57 | 2009 |
| A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft A Elefsiniotis, N Kokorakis, T Becker, U Schmid Sensors and Actuators A: Physical 206, 159-164, 2014 | 56 | 2014 |
| Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions A Ababneh, H Kreher, U Schmid Microsystem Technologies 14, 567-573, 2008 | 56 | 2008 |
| ScAlN MEMS cantilevers for vibrational energy harvesting purposes PM Mayrhofer, C Rehlendt, M Fischeneder, M Kucera, E Wistrela, ... Journal of Microelectromechanical Systems 26 (1), 102-112, 2016 | 54 | 2016 |
| Effect of high temperature annealing on the electrical performance of titanium/platinum thin films U Schmid, H Seidel Thin Solid Films 516 (6), 898-906, 2008 | 54 | 2008 |
| A robust pressure sensor for harsh environmental applications S Fricke, A Friedberger, H Seidel, U Schmid Sensors and Actuators A: Physical 184, 16-21, 2012 | 53 | 2012 |
| The porosification of fired LTCC substrates by applying a wet chemical etching procedure A Bittner, U Schmid Journal of the European Ceramic Society 29 (1), 99-104, 2009 | 52 | 2009 |
Michael SchneiderPostDoc ISAS, TU WienVerified email at tuwien.ac.at
